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| Wafer Grinding |
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Component
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Component: |
Wafer |
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Dimensions: |
Ø 2" - 12" |
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Material: |
Si, SiC, Sapphire (C-, A- and R-Plane), GaAs, GaN, etc. |

Grinding Machine
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Machine: |
Disco, Supfina, Okamoto, Strasbaugh, G&N, etc. |
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Grinding Op: |
thinning (rough- and fine grinding), backgrinding, reclaim grinding |

Grinding Tool
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Grinding Tool: |
rough grinding: 325 - 550 mesh
fine grinding: up to 8500 mesh |

Results
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Surface Finish Achieved: |
Ra 0.4 - Ra 0.015, depending on tool specification |
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Geometry Tolerances Achieved: |
TTV <2µm |
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Wheels

Quills

Dressing Tools and Spindles

Governing Factors

Grinding Wheel Calculations

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